Semiconductor Grade Opaque Quartz Ingot

I. Application

Semiconductor opaque quartz ingot is used as Heat insulation material in semiconductor wafer manufacturing process.

II. Product Features

Semiconductor opaque quartz ingot features high purity, good heat insulation and high-temperature resistance, etc.

III. Product Type

WQPQ872E | WQPQ872EH

IV. Typical Size

Dimension Range(MAX:OD*H)
450±3*500±3mm

V. Physical and Chemical Properties

i. Physical Properties

Item Index Value
 Density(g/cm3) 2.0
 Heat Conductivity(w/m·k,1000℃) 2.28
 Bore Diameter(um) <50
 Coefficient of Linear Expansion(℃-1,0-900℃) 0.47×10-6
 Annealing point(℃) 1080
 Max. working temperature – continuous(℃) 1100
 Max. working temperature – short term(℃) 1300

ii. Trace Elements

CodeCriteriaAlCaCrCuFeKLiMgMnNaTiZr
 PQ872ETypical130.5<0.05<0.050.10.10.30.050.050.11.31
Maximum1910.10.10.5110.20.2122
PQ872EHTypical0.090.02<0.01<0.010.020.02<0.010.02<0.010.020.05<0.01

iv. Optical Properties

Shopping Cart
Scroll to Top