I. Application
Semiconductor opaque quartz ingot is used as Heat insulation material in semiconductor wafer manufacturing process.
II. Product Features
Semiconductor opaque quartz ingot features high purity, good heat insulation and high-temperature resistance, etc.
III. Product Type
WQPQ872E | WQPQ872EH
IV. Typical Size
| Dimension Range（MAX:OD*H） |
| 450±3*500±3mm |
V. Physical and Chemical Properties
i. Physical Properties
| Item | Index Value |
| Density（g/cm3） | 2.0 |
| Heat Conductivity（w/m·k，1000℃） | 2.28 |
| Bore Diameter(um) | <50 |
| Coefficient of Linear Expansion（℃-1，0-900℃） | 0.47×10-6 |
| Annealing point（℃） | 1080 |
| Max. working temperature – continuous（℃） | 1100 |
| Max. working temperature – short term（℃） | 1300 |
ii. Trace Elements
| Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
| PQ872E | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 | |
| PQ872EH | Typical | 0.09 | 0.02 | <0.01 | <0.01 | 0.02 | 0.02 | <0.01 | 0.02 | <0.01 | 0.02 | 0.05 | <0.01 |
iv. Optical Properties
