I. Application
Semiconductor grade quartz cylinder is used as the base material of quartz ring in semiconductor etching process.
II. Product Features
Semiconductor grade quartz cylinder features high purity, micro bubble free, low hydroxyl, etc.
III. Product Type
WQPQ100E | WQPQ100EH
IV. Typical Size
| OD Range | ID Range |
| 300-350 | 210-240 |
| 350-400 | 240-300 |
| 400-450 | 330-350 |
V. Physical and Chemical Properties
i. Physical Properties
| Item | Index |
| Density（g/cm3） | 2.2 |
| Heat Conductivity（w/m·k，1000℃） | 2.28 |
| Coefficient of Thermal Expansion（℃-1，1000℃） | 5.5×10-7 |
| Softening Point（℃） | 1670 |
| Annealing Point（℃） | 1210 |
| Strain Point（℃） | 1110 |
ii. Trace Elements
| Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
| PQ100E | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 | |
| PQ100EH | Typical | 8 | 0.6 | <0.05 | <0.01 | 0.1 | 0.1 | 0.2 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 10 | 1 | 0.1 | <0.01 | 0.5 | 0.5 | 0.5 | 0.2 | 0.2 | 0.5 | 2 | 2 |
iii. OH Content
OH < 110
iv. Coefficient of Thermal Expansion and Viscosity
