Semiconductor Grade Quartz Cylinder

I. Application

Semiconductor grade quartz cylinder is used as the base material of quartz ring in semiconductor etching process.

II. Product Features

Semiconductor grade quartz cylinder features high purity, micro bubble free, low hydroxyl, etc.

III. Product Type

WQPQ100E | WQPQ100EH

IV. Typical Size

OD RangeID Range
300-350210-240
350-400240-300
400-450330-350

V. Physical and Chemical Properties

i. Physical Properties

ItemIndex
Density(g/cm32.2
Heat Conductivity(w/m·k,1000℃)2.28
Coefficient of Thermal Expansion(℃-1,1000℃)5.5×10-7
Softening Point(℃)1670
Annealing Point(℃)1210
Strain Point(℃)1110

ii. Trace Elements

CodeCriteriaAlCaCrCuFeKLiMgMnNaTiZr
 PQ100ETypical130.5<0.05<0.050.10.10.30.050.050.11.31
Maximum1910.10.10.5110.20.2122
 PQ100EHTypical80.6<0.05<0.010.10.10.20.050.050.11.31
Maximum1010.1<0.010.50.50.50.20.20.522

iii. OH Content

OH < 110

iv. Coefficient of Thermal Expansion and Viscosity

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