I. Application
Semiconductor grade quartz ingot is used as base material for various quartz wares in direct
contact with reaction chambers in semiconductor wafer manufacturing process.
II. Product Features
Semiconductor grade quartz ingot features high purity, low hydroxyl, good high-temperature resistance and few micro bubbles, etc.
III. Product Type
WQPQ811E | WQPQ811EH
IV. Typical Size
| Size Range（OD*H） |
| 1800±20*600±20mm |
V. Physical and Chemical Properties
i. Physical Properties
| Item | Index Value |
| Density（g/cm3） | 2.2 |
| Heat Conductivity（w/m·k，1000℃） | 2.28 |
| Coefficient of Thermal Expansion（℃-1，1000℃） | 5.5×10-7 |
| Softening Point（℃） | 1670 |
| Annealing Point（℃） | 1210 |
| Strain Point（℃） | 1110 |
ii. Trace Elements
| Item | Index Value |
| Density（g/cm3） | 2.2 |
| Heat Conductivity（w/m·k，1000℃） | 2.28 |
| Coefficient of Thermal Expansion（℃-1，1000℃） | 5.5×10-7 |
| Softening Point（℃） | 1670 |
| Annealing Point（℃） | 1210 |
| Strain Point（℃） | 1110 |
iii. OH Content
OH < 30PPM
iv. Coefficient of Thermal Expansion and Viscosity
