Semiconductor Grade Quartz Ingot

I. Application

Semiconductor grade quartz ingot is used as base material for various quartz wares in direct
contact with reaction chambers in semiconductor wafer manufacturing process.

II. Product Features

Semiconductor grade quartz ingot features high purity, low hydroxyl, good high-temperature resistance and few micro bubbles, etc.

III. Product Type

WQPQ811E | WQPQ811EH

IV. Typical Size

Size Range(OD*H)
1800±20*600±20mm

V. Physical and Chemical Properties

i. Physical Properties

ItemIndex Value
Density(g/cm32.2
Heat Conductivity(w/m·k,1000℃)2.28
Coefficient of Thermal Expansion(℃-1,1000℃)5.5×10-7
Softening Point(℃)1670
Annealing Point(℃)1210
Strain Point(℃)1110

ii. Trace Elements

ItemIndex Value
Density(g/cm32.2
Heat Conductivity(w/m·k,1000℃)2.28
Coefficient of Thermal Expansion(℃-1,1000℃)5.5×10-7
Softening Point(℃)1670
Annealing Point(℃)1210
Strain Point(℃)1110

iii. OH Content

OH < 30PPM

iv. Coefficient of Thermal Expansion and Viscosity

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