Semiconductor Grade Quartz Plate

I. Application

Semiconductor grade quartz plate is used as high quality quartz base material in semiconductor field with high processing utilization.

II. Product Features

Semiconductor quartz plate features accurate flatness, slight thickness deviation and few bubbles, etc.

III. Product Type

WQPQ161E

IV. Typical Size

DiameterHeightLength
50-4502-301000-3000

V. Physical and Chemical Properties

i. Physical Properties

ItemIndex Value
Density(g/cm32.2
Heat Conductivity(w/m·k,1000℃)2.28
Coefficient of Thermal Expansion(℃-1,1000℃)5.5×10-7
Softening Point(℃)1670
Annealing Point(℃)1210
Strain Point(℃)1110

ii. OH Content

OH < 10PPM

iii. Trace Elements

CodeCriteriaAlCaCrCuFeKLiMgMnNaTiZr
 PQ161ETypical130.5<0.05<0.050.10.10.30.050.050.11.31
Maximum1910.10.10.5110.20.2122

iv. Coefficient of Thermal Expansion and Viscosity

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