I. Application
Semiconductor grade quartz rod is used as the base material of quartz wares in semiconductor wafer manufacturing process.
II. Product Features
Semiconductor grade quartz rod features high purity, low hydroxyl and excellent high temperature resistance, etc.
III. Product Type
WQPQ191
IV. Typical Size
| OD Range | OD Tolerance | Ovality | Bow |
| OD＜10.00 | ±2.00% | 2.00% | 0.15% |
| 10.00≤OD＜20.00 | ±1.25% | 1.25% | 0.15% |
| 20.00≤OD＜30.00 | ±1.25% | 1.25% | 0.15% |
| 30.00≤OD＜50.00 | ±1.25% | 1.25% | 0.15% |
| 50.00≤OD＜100.00 | ±1.25% | 1.25% | 0.15% |
| 100.00≤OD＜160.00 | ±1.00% | 1.00% | 0.15% |
V. Physical and Chemical Properties
i. Physical Properties
| Item | Index Value |
| Density（g/cm3） | 2.2 |
| Heat Conductivity（w/m·k，1000℃） | 2.28 |
| Coefficient of Thermal Expansion（℃-1，1000℃） | 5.5×10-7 |
| Softening Point（℃） | 1670 |
| Annealing Point（℃） | 1210 |
| Strain Point（℃） | 1110 |
ii. Trace Elements
| Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
| PQ191E | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 | |
| PQ191EH | Typical | 8 | 0.6 | <0.05 | <0.01 | 0.1 | 0.1 | 0.2 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 10 | 1 | 0.1 | <0.01 | 0.5 | 0.5 | 0.5 | 0.2 | 0.2 | 0.5 | 2 | 2 |
iii. OH Content
OH < 30PPM
iv. Coefficient of Thermal Expansion and Viscosity
