I. Application
Semiconductor grade quartz rod is used as the base material of quartz wares in semiconductor wafer manufacturing process.
II. Product Features
Semiconductor grade quartz rod features high purity, low hydroxyl and excellent high temperature resistance, etc.
III. Product Type
WQPQ191
IV. Typical Size
OD Range | OD Tolerance | Ovality | Bow |
OD<10.00 | ±2.00% | 2.00% | 0.15% |
10.00≤OD<20.00 | ±1.25% | 1.25% | 0.15% |
20.00≤OD<30.00 | ±1.25% | 1.25% | 0.15% |
30.00≤OD<50.00 | ±1.25% | 1.25% | 0.15% |
50.00≤OD<100.00 | ±1.25% | 1.25% | 0.15% |
100.00≤OD<160.00 | ±1.00% | 1.00% | 0.15% |
V. Physical and Chemical Properties
i. Physical Properties
Item | Index Value |
Density(g/cm3) | 2.2 |
Heat Conductivity(w/m·k,1000℃) | 2.28 |
Coefficient of Thermal Expansion(℃-1,1000℃) | 5.5×10-7 |
Softening Point(℃) | 1670 |
Annealing Point(℃) | 1210 |
Strain Point(℃) | 1110 |
ii. Trace Elements
Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
PQ191E | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 | |
PQ191EH | Typical | 8 | 0.6 | <0.05 | <0.01 | 0.1 | 0.1 | 0.2 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
Maximum | 10 | 1 | 0.1 | <0.01 | 0.5 | 0.5 | 0.5 | 0.2 | 0.2 | 0.5 | 2 | 2 |
iii. OH Content
OH < 30PPM