Semiconductor Grade Quartz Rod

I. Application

Semiconductor grade quartz rod is used as the base material of quartz wares in semiconductor wafer manufacturing process.

II. Product Features

Semiconductor grade quartz rod features high purity, low hydroxyl and excellent high temperature resistance, etc.

III. Product Type

WQPQ191

IV. Typical Size

OD RangeOD ToleranceOvalityBow
OD<10.00±2.00%2.00%0.15%
10.00≤OD<20.00±1.25%1.25%0.15%
20.00≤OD<30.00±1.25%1.25%0.15%
30.00≤OD<50.00±1.25%1.25%0.15%
50.00≤OD<100.00±1.25%1.25%0.15%
100.00≤OD<160.00±1.00%1.00%0.15%

V. Physical and Chemical Properties

i. Physical Properties

ItemIndex Value
Density(g/cm32.2
Heat Conductivity(w/m·k,1000℃)2.28
Coefficient of Thermal Expansion(℃-1,1000℃)5.5×10-7
Softening Point(℃)1670
Annealing Point(℃)1210
Strain Point(℃)1110

ii. Trace Elements

CodeCriteriaAlCaCrCuFeKLiMgMnNaTiZr
 PQ191ETypical130.5<0.05<0.050.10.10.30.050.050.11.31
Maximum1910.10.10.5110.20.2122
 PQ191EHTypical80.6<0.05<0.010.10.10.20.050.050.11.31
Maximum1010.1<0.010.50.50.50.20.20.522

iii. OH Content

OH < 30PPM

iv. Coefficient of Thermal Expansion and Viscosity

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