I. Application
Semiconductor grade quartz tube is widely used in the oxidation and diffusion process in semiconductor wafer manufacturing.
II. Product Features
Semiconductor grade quartz tube features high purity, low hydroxyl and good high-temperature resistance, etc.
III. Product Type
WQPQ181E | WQPQ181E-R | WQPQ181EH-R
IV. Typical Size
| OD Range | OD Tolerance | WT Tolerance | Siding | Ovality | Bow |
| OD＜100.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 100.00≤OD＜200.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 200.00≤OD＜300.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 300.00≤OD＜400.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 400.00≤OD＜500.00 | ±1.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
| 500.00≤OD＜900.00 | ±2.00 | ±10.00% | 15.00% | 1.00% | 0.10% |
V. Physical and Chemical Properties
i. Physical Properties
| Item | Index Value |
| Density（g/cm3） | 2.2 |
| Heat Conductivity（w/m·k，1000℃） | 2.28 |
| Coefficient of Thermal Expansion（℃-1，1000℃） | 5.5×10-7 |
| Softening Point（℃） | 1670 |
| Annealing Point（℃） | 1210 |
| Strain Point（℃） | 1110 |
ii. Trace Elements
| Code | Criteria | Al | Ca | Cr | Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
| PQ181E PQ181E-R | Typical | 13 | 0.5 | <0.05 | <0.05 | 0.1 | 0.1 | 0.3 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 19 | 1 | 0.1 | 0.1 | 0.5 | 1 | 1 | 0.2 | 0.2 | 1 | 2 | 2 | |
| PQ181EH PQ181EH-R | Typical | 8 | 0.6 | <0.05 | <0.01 | 0.1 | 0.1 | 0.2 | 0.05 | 0.05 | 0.1 | 1.3 | 1 |
| Maximum | 10 | 1 | 0.1 | <0.01 | 0.5 | 0.5 | 0.5 | 0.2 | 0.2 | 0.5 | 2 | 2 |
iii. OH Content
| PQ181E/ PQ181EH | OH＜10ppm | PQ181E-R/ PQ181EH-R | OH＜30ppm |
iv. Coefficient of Thermal Expansion and Viscosity
