Semiconductor Grade Quartz Tube

I. Application

Semiconductor grade quartz tube is widely used in the oxidation and diffusion process in semiconductor wafer manufacturing.

II. Product Features

Semiconductor grade quartz tube features high purity, low hydroxyl and good high-temperature resistance, etc.

III. Product Type

WQPQ181E | WQPQ181E-R | WQPQ181EH-R

IV. Typical Size

OD RangeOD ToleranceWT Tolerance Siding Ovality Bow
OD<100.00±1.00±10.00%15.00%1.00%0.10%
100.00≤OD<200.00±1.00±10.00%15.00%1.00%0.10%
200.00≤OD<300.00±1.00±10.00%15.00%1.00%0.10%
300.00≤OD<400.00±1.00±10.00%15.00%1.00%0.10%
400.00≤OD<500.00±1.00±10.00%15.00%1.00%0.10%
500.00≤OD<900.00±2.00±10.00%15.00%1.00%0.10%

V. Physical and Chemical Properties

i. Physical Properties

ItemIndex Value
Density(g/cm32.2
Heat Conductivity(w/m·k,1000℃)2.28
Coefficient of Thermal Expansion(℃-1,1000℃)5.5×10-7
Softening Point(℃)1670
Annealing Point(℃)1210
Strain Point(℃)1110

ii. Trace Elements

CodeCriteriaAlCaCrCuFeKLiMgMnNaTiZr
PQ181E PQ181E-RTypical130.5<0.05<0.050.10.10.30.050.050.11.31
Maximum1910.10.10.5110.20.2122
PQ181EH PQ181EH-RTypical80.6<0.05<0.010.10.10.20.050.050.11.31
Maximum1010.1<0.010.50.50.50.20.20.522

iii. OH Content

PQ181E/ PQ181EHOH<10ppmPQ181E-R/ PQ181EH-ROH<30ppm

iv. Coefficient of Thermal Expansion and Viscosity

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